Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon

A. Moreno Barrado, M. Castro

International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 May 2013

Publication date: 2013-05-26.

Citation:
A. Moreno Barrado, M. Castro, Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon, International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 May 2013.

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